Characteristics of microvalves for metal-MEMS diaphragm micropump
نویسندگان
چکیده
منابع مشابه
Simulation and Derivation of Deflection Equation for Suspended Diaphragm for MEMS Application Using Kirchhoff-Love Theory
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ژورنال
عنوان ژورنال: Journal of the Visualization Society of Japan
سال: 2008
ISSN: 0916-4731,1884-037X
DOI: 10.3154/jvs.28.125